Laser-Plasmon is based in the iSMART facility in the School of Science and Technology. It offers a range of materials deposition, processing and characterisation services to industry and academia.

  • Clean room facility
  • Deposition techniques
    • RF/DC magnetron sputtering (we deposit a variety of thin film materials from metals, dielectrics, semiconductors)
    • Thermal evaporation (we deposit a variety of metals and composites)
    • Atomic Layer Deposition (we deposit a variety of metal oxides and nitrides)
  • Photonic processing techniques
    • Excimer laser sources (ns): ArF (193 nm) and KrF (248 nm)
    • Nd:YAG laser (ns): 1054 nm, 532 nm, 355 nm, 266 nm. An Optical Parametric Oscillator unit is available to provide all wavelengths from 400 to 700 nm.
    • Excimer lamp (172 nm)
  • Thin film metrology
    • Infrared Variable Angle Spectroscopic Ellipsometry (spectral range: 1600 – 40000 nm or 250 – 8000 cm-1)
    • Scanning electron microscopy
    • Optical reflectance / transmittance spectroscopy (spectral range: 350 – 30000 nm)
    • Luminescence characterisation (photo-luminescence & cathodo-luminescence)
    • 3D optical profilometer
    • Atomic Force Microscopy

Contact: Dr. Nikolaos Kalfagiannis (nikolaos.kalfagiannis@ntu.ac.uk)

Luminescent materials and characterisation sputtering system 4 laser system 3